Lattice strain of hydrogen-implanted silicon: Correlation between X-ray scattering analysis andab-initiosimulations
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4800538
Reference21 articles.
1. Chapter 1 Introduction to Hydrogen in Semiconductors
2. Silicon on insulator material technology
3. Lattice Strain and Strain Evolution in Hydrogen-Implanted Materials: The Roles of Mechanical Properties and Hydrogen Diffusion
4. On the mechanism of the hydrogen-induced exfoliation of silicon
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