Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H+ ions implanted LiTaO3
Author:
Affiliation:
1. CEMES-CNRS and Université de Toulouse, 29 rue Jeanne Marvig, BP 94347, 31055 Toulouse Cedex 4, France
2. SOITEC, Parc technologique des Fontaines, Bernin 38926, Crolles Cedex, France
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0040729
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