Oxygen incorporation in thin films of In2O3:Sn prepared by radio frequency sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1287603
Reference21 articles.
1. ITO films for antireflective and antistatic tube coatings prepared by d.c. magnetron sputtering
2. Electrical properties and defect model of tin-doped indium oxide layers
3. Density and refractive index of TiO2 films prepared by reactive evaporation
4. X-ray and optical measurements in the In2O3SnO2 system
5. The dynamics of reactive ion sputtering of SnSb and InSn alloys in an ArO2 atmosphere
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