Micrograin structure influence on electrical characteristics of sputtered indium tin oxide films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.355093
Reference18 articles.
1. Low resistivity indium–tin oxide transparent conductive films. II. Effect of sputtering voltage on electrical property of films
2. High rate sputtering techniques
3. High rate sputtering deposition of nickel using dc magnetron mode
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