Determination of plasma impedance of microwave plasma system by electric field simulation
Author:
Affiliation:
1. Graduate School of Engineering, Osaka University, 2–1 Yamada-Oka, Suita, Osaka 565–0871, Japan
Funder
Ministry of Education, Culture, Sports, Science and Technology (MEXT)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Reference37 articles.
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