High-quality strain-relaxed SiGe alloy grown on implanted silicon–on–insulator substrate
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.126442
Reference7 articles.
1. Totally relaxed GexSi1−xlayers with low threading dislocation densities grown on Si substrates
2. New approach to the growth of low dislocation relaxed SiGe material
3. Relaxed Si1−xGex films with reduced dislocation densities grown by molecular beam epitaxy
4. Photoluminescence and X-ray characterization of relaxed Si1 − xGex alloys grown on silicon on insulator (SOI) and implanted SOI substrates
5. Strain transfer between thin films on buried oxide and its application in heteroepitaxial crystal growth
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