Substrate effect on the crystal structure and ferroelectricity of low-temperature-deposited Pb(Zr, Ti)O3 thin films by metalorganic chemical vapor deposition-Reference-Cited by-同舟云学术

Substrate effect on the crystal structure and ferroelectricity of low-temperature-deposited Pb(Zr, Ti)O3 thin films by metalorganic chemical vapor deposition

Published:2003-06-09 Issue:23 Volume:82 Page:4122-4124
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Tokita Kouji,Aratani Masanori,Funakubo Hiroshi

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1581975

Reference8 articles.

1. Fabrication of PbTiO3 thin films by laser metalorganic chemical vapor deposition

2. Low-Temperature Fabrication of Ir/Pb(Zr,Ti)O3/Ir Capacitors Solely by Metalorganic Chemical Vapor Deposition

3. Preparation and Characterization of Pb(Zr,Ti)O3Films Deposited on Pt/RuO2Hybrid Electrode for Ferroelectric Random Access Memory Devices

4. Low temperature synthesis of PbTiO3 thin films by MOCVD without carrier gas

5. Characteristics of Pb(Zr, Ti)O3thin films prepared on various substrates by source gas pulse-introduced metalorganic chemical vapor deposition

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