Characterization and depth profiling ofE’ defects in buried SiO2
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.354103
Reference35 articles.
1. Electron spin resonance characterization and localization of a thermally generated donor inherent to the separation by implantation of oxygen process
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5. SIMOX with epitaxial silicon: point defects and positive charge
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