Investigation of the static electric field effect of strontium silicate layers on silicon substrates

Author:

Taniwaki Shota1,Imanishi Keiji1,Umano Mitsuhiro1,Yoshida Haruhiko1,Arafune Koji1,Ogura Atsushi2,Satoh Shin-ichi1,Hotta Yasushi1

Affiliation:

1. School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2280, Japan

2. School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 214-8571, Japan

Funder

New Energy and Industrial Technology Development Organization (NEDO)

Japan Society for the Promotion of Science (JSPS)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Electrostatic Tuning of Ionic Charge in SiO2 Dielectric Thin Films;ECS Journal of Solid State Science and Technology;2022-06-01

2. Control of dipole properties in high-k and SiO2 stacks on Si substrates with tricolor superstructure;Applied Physics Letters;2018-07-02

3. Potassium ions in SiO2: electrets for silicon surface passivation;Journal of Physics D: Applied Physics;2017-12-12

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