Realizing in-plane surface diffraction by x-ray multiple-beam diffraction with large incidence angle-Reference-Cited by-同舟云学术

Realizing in-plane surface diffraction by x-ray multiple-beam diffraction with large incidence angle

Author:

Huang Xian-Rong¹,Peng Ru-Wen²,Gog Thomas¹,Siddons D. P.³,Assoufid Lahsen¹

Affiliation:

1. Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439, USA

2. National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China

3. National Synchrotron Light Source, Brookhaven National Laboratory, Upton, New York 11973, USA

Funder

U.S. Department of Energy (DOE)

National Natural Science Foundation of China (NSFC)

Ministry of Science and Technology of the People's Republic of China (Chinese Ministry of Science and Technology)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

Reference19 articles.

4. D. K. Bowen and B. K. Tanner , X-Ray Metrology in Semiconductor Manufacturing ( CRC Press, Boca Raton, 2006).

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