Fracture testing of silicon microcantilever beams
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.361102
Reference12 articles.
1. A detailed fractographic analysis of cleavage steps in silicon
2. Modeling of thermal and mechanical stresses in silicon microstructures
3. Fracture testing of silicon microelementsinsituin a scanning electron microscope
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