Infrared monitoring system for the detection of organic contamination on a 300 mm Si wafer
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124434
Reference13 articles.
1. The Evolution of Silicon Wafer Cleaning Technology
2. Effects of Certain Chemical Treatments and Ambient Atmospheres on Surface Properties of Silicon
3. Formation of SiH bonds on the surface of microcrystalline silicon covered with SiOx by HF treatment
4. Unusually Low Surface-Recombination Velocity on Silicon and Germanium Surfaces
5. Chemical and electronic structure of the SiO2/Si interface
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