Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas-Reference-Cited by-同舟云学术

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Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas

Published:2004-12-13 Issue:24 Volume:85 Page:5857-5859
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Sasaki Akira,Nishihara Katsunobu,Murakami Masakatsu,Koike Fumihiro,Kagawa Takashi,Nishikawa Takashi,Fujima Kazumi,Kawamura Tohru,Furukawa Hiroyuki

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1834994

Reference19 articles.

1. High-power extreme-ultraviolet source based on gas jets

2. HEIGHTS initial simulation of discharge-produced plamsa hydrodynamics and radiation transport for EUV lithography

3. Estimation of emission efficiency for laser-produced EUV plasmas

4. Laser-produced-plasma light source development for extreme ultraviolet lithography

5. High-resolution spectrum of xenon ions at 134 nm

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