Effects of dissolved nitrogen in improving barrier properties of ruthenium
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2167610
Reference7 articles.
1. Diffusion Studies of Copper on Ruthenium Thin Film
2. Electrodeposition of Copper Thin Film on Ruthenium
3. Binary Alloy Phase Diagrams, edited by T. B. Massalski, 2nd ed. (American Society of Metals, Materials Park, OH, 1990), p. 1467.
4. Silicides of ruthenium and osmium: Thin film reactions, diffusion, nucleation, and stability
5. Properties of reactively sputtered WN x as Cu diffusion barrier
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