Atomic Layer Deposition and Atomic Layer Etching—An Overview of Selective Processes
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-030-65261-6_20
Reference67 articles.
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4. Mackus AJM, Bol AA, Kessels WMM (2014) The use of atomic layer deposition in advanced nanopatterning. Nanoscale 6:10941–10946. https://doi.org/10.1039/C4NR01954G
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