Author:
Tsaur B.‐Y.,Donnelly J. P.,Fan John C. C.,Geis M. W.
Subject
Physics and Astronomy (miscellaneous)
Cited by
40 articles.
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1. Introduction;Flash Lamp Annealing;2019
2. Evolution of secondary defects in arsenic implanted Si;Japanese Journal of Applied Physics;2016-03-17
3. Ion Implantation in Iii–V Semiconductors;Materials Processing: Theory and Practices;1989
4. Rapid thermal annealing of arsenic-implanted silicon: A review;Thin Solid Films;1988-11
5. Rapid isothermal processing;Journal of Applied Physics;1988-04-15