Time-resolved spectroscopy using a chopper wheel as a fast shutter
Author:
Affiliation:
1. Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, USA
2. Department of Physics, University of Wisconsin-Madison, Madison, Wisconsin 53706, USA
Funder
National Science Foundation (NSF)
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4906290
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1. End Point Detection in Plasma Etching by Optical Emission Spectroscopy
2. Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. I. Ultraviolet Spectrum
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