Complex transients in power modulated inductively-coupled chlorine plasmas
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Published:2019-02-25
Issue:2
Volume:28
Page:025005
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ISSN:1361-6595
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
List Tyler,
Ma Tianyu,
Arora PriyankaORCID,
Donnelly Vincent MORCID,
Shannon Steven
Funder
Samsung Electronics
Subject
Condensed Matter Physics
Cited by
7 articles.
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