Author:
Chen Wei‐Ming,Banerjee Sanjay K.,Lee Jack C.
Subject
Physics and Astronomy (miscellaneous)
Cited by
24 articles.
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1. CoSi[sub x] thermal stability on narrow-width polysilicon resistors;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006
2. Thermal stability study on nanoscale polysilicide resistors;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006
3. Thermal stability enhancement of silicides by using N2 and Ar implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2005-08
4. On the Morphological Changes of Ni- and Ni(Pt)-Silicides;Journal of The Electrochemical Society;2005
5. Real-time x-ray scattering study on the thermal evolution of interface roughness in CoSi2 formation;Applied Physics Letters;2002-02-25