Magnetron sputtering of Fe onto GaAs substrates: Energetic bombardment effects
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.352200
Reference28 articles.
1. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
2. Correlation between the ion bombardment during film growth of Pd films and their structural and electrical properties
3. Ion beam enhanced epitaxial growth of Ge (001)
4. Role of ions in ion-based film formation
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1. Dual frequency capacitive plasmas in Fe and Ni sputter applications: correlation of discharge properties on thin film properties;Plasma Sources Science and Technology;2012-01-31
2. Q-Band Ferromagnetic Resonance Study of Fe Thin Films on GaAs(001) Deposited by RF Magnetron Sputtering;IEEE Transactions on Magnetics;2011-12
3. Magnetic Properties of Fe(001) Thin Films on GaAs(001) Deposited by RF Magnetron Sputtering;Journal of Physics: Conference Series;2011-01-01
4. Magnetic properties of Fe films and Fe∕Si∕Fe trilayers grown on GaAs(001) and MgO(001) by ion-beam sputter epitaxy;Journal of Applied Physics;2006-05
5. Structure characterization of Fe films grown on GaAs (100) by ion-beam sputter epitaxy;Journal of Crystal Growth;2004-06
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