The role of crystal‐growth properties on silicon implant activation processes for GaAs
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.341818
Reference10 articles.
1. Effect of Melt Stoichiometry on Electrical Activation Uniformity of Si-Implanted Layers in Undoped Semi-Insulating GaAs
2. Effect of crystal stoichiometry on activation efficiency in Si implanted, rapid thermal annealed GaAs
3. A novel application of the vertical gradient freeze method to the growth of high quality III–V crystals
4. Experimental requirements for quantitative mapping of midgap flaw concentration in semi‐insulating GaAs wafers by measurement of near‐infrared transmittance
5. Direct observation of the principal deep level (EL2) in undoped semi‐insulating GaAs
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mapping of the Residual Voltage of Hall Devices Fabricated by P + Si Coimplantation on GaAs Wafers;Physica Status Solidi (a);1996-06-16
2. Complete p‐type activation in vertical‐gradient freeze GaAs co‐implanted with gallium and carbon;Applied Physics Letters;1996-03-11
3. Participation ofEL2 in the donor activation of silicon implanted into GaAs;Physical Review B;1994-06-15
4. Comparison of deep centers in semi‐insulating liquid‐encapsulated Czochralski and vertical‐gradient freeze GaAs;Journal of Applied Physics;1991-06-15
5. Si-implantation into GaAs grown on Si;Journal of Electronic Materials;1990-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3