Relationships between the plasma environment and the composition and optical properties of plasma‐polymerized thin films produced in rf discharges of C2H2‐SF6mixtures-Reference-Cited by-同舟云学术

Relationships between the plasma environment and the composition and optical properties of plasma‐polymerized thin films produced in rf discharges of C2H2‐SF6mixtures

Published:1992-01 Issue:1 Volume:71 Page:448-455
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Durrant Steven F.,Mota Rogério P.,Bica de Moraes Mário A.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.350676

Reference28 articles.

1. Application of polymer films plasma polymerized in the tetramethylsilane/ammonia mixture to moisture sensor

2. Plasma-polymerized organosiloxane membranes prepared by simultaneous doping of I2 molecules and the effect on liquid permeability

3. Plasma‐Polymerized Dry‐Developable Resist for Synchrotron Radiation Lithography

4. Corrosion protection by plasma-polymerized coatings

5. Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density

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