Force sensing microcantilever using sputtered zinc oxide thin film
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110913
Reference11 articles.
1. Atomic Force Microscope
2. Atomic Resolution with Atomic Force Microscope
3. An atomic‐resolution atomic‐force microscope implemented using an optical lever
4. Low‐frequency piezoelectric‐transducer applications of ZnO film
5. Integrated silicon microbeam PI-FET accelerometer
Cited by 52 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A review of piezoelectric MEMS sensors and actuators for gas detection application;Discover Nano;2023-02-27
2. Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: A review;Microelectronic Engineering;2022-07
3. Electromechanical resonators for sensing fluid density and viscosity—a review;Measurement Science and Technology;2021-10-21
4. Study on the progress of piezoelectric microcantilever beam micromass sensor;IOP Conference Series: Earth and Environmental Science;2021-02-01
5. Design and fabrication of a graphene-based microcantilever flow sensor for liquid flow measurement;Sensors and Actuators A: Physical;2021-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3