Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: A review-Reference-Cited by-同舟云学术

Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: A review

Published:2022-07 Issue: Volume:263 Page:111854
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Manvi Mahammadrafeeq,Mruthyunjaya Swamy K.B.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference97 articles.

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4. Manufacturing Techniques for Microfabrication and Nanotechnology;Madou,2011

5. A batch-fabricated silicon accelerometer;Roylance;IEEE Trans. Electron Dev.,1979

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