Study on the progress of piezoelectric microcantilever beam micromass sensor

Abstract

Abstract A variety of excitation modes and signal readout modes of the microcantilever beam are all derived from the deformation characteristics of the cantilever beam, while in the detection of environmental pollutants, deformation of non-quality factors such as environmental vibration, wind, rain and snow will inevitably occur. If we only start from the deformation quantity, the consistency between the obtained results and the actual fouling micro-mass value is more prominent. Therefore, the structure, size, working mode and material properties of the microcantilever beam should be fully considered in simulation and design. The resonant frequency of the microcantilever beam must be large enough to prevent external vibration interference measurement and improve the SNR.