Design and Simulation Analysis of a Piezoresistive Cantilever Beam for Low-Pressure Detection
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Publisher
Springer Nature Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-19-2308-1_37
Reference12 articles.
1. Guo K, Jiang B, Liu B, Xingeng Li, Wu Y, Tian S, Gao Z, Zong L, Yao S, Zhao M, Mi C, Zhu G (2021) Study on the progress of piezoelectric microcantilever beam micromass sensor. IOP Conf Ser Earth Environ Sci 651:022091. https://doi.org/10.1088/1755-1315/651/2/022091
2. Ali S, Bhuvaneswari H, Kumar B (2020) Design and modeling of a large deflection microcantilever using rectangular SCR. AIP Conf Proc 2281:020037. https://doi.org/10.1063/5.0027942
3. Rotake D, Darji A (2020) Design and reliability testing of microcantilever-based piezoresistive sensor for BioMEMS application. https://doi.org/10.13140/RG.2.2.25052.92803
4. Ashok A, Nighot R, Sahu N, Pal P, Pandey A (2019) Design and analysis of microcantilever beams based on arrow shape. Microsyst Technol 25:4379–4390. https://doi.org/10.1007/s00542-019-04555-4
5. Passian A, Thundat T, Thanihaichelvan M (2017) Microcantilever sensors. https://doi.org/10.1016/B978-0-12-803581-8.10525-9
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