Nanostructures of the turbostratic BN transition layer in cubic BN thin films deposited by low-pressure inductively coupled plasma-enhanced chemical vapor deposition-Reference-Cited by-同舟云学术

Nanostructures of the turbostratic BN transition layer in cubic BN thin films deposited by low-pressure inductively coupled plasma-enhanced chemical vapor deposition

Published:2002 Issue:10 Volume:91 Page:6695
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:J. Appl. Phys.

Author:

Yang H. S.,Iwamoto C.,Yoshida T.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference28 articles.

1. Cubic boron nitride: synthesis, physicochemical properties and applications

2. Preparation of cubic boron nitride film by activated reactive evaporation with a gas activation nozzle

3. Phase evolution in boron nitride thin films

4. Compressive stress induced formation of cubic boron nitride

5. Preparation of Cubic Boron Nitride Films by RF Sputtering

Cited by 35 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ab initio study of pressure-dependent phonon heat conduction in cubic boron nitride;International Journal of Heat and Mass Transfer;2023-07

2. Impact on the microstructure, optical and electrical properties of cubic boron nitride thin films under post thermal annealing;Journal of Alloys and Compounds;2022-11

3. Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique;Japanese Journal of Applied Physics;2022-06-13

4. Characterization of surface modification mechanisms for boron nitride films under plasma exposure;Surface and Coatings Technology;2019-11

5. Effect of low-energy ion impact on the structure of hexagonal boron nitride films studied in surface-wave plasma;Surface and Interface Analysis;2018-11-08