Effect of low-energy ion impact on the structure of hexagonal boron nitride films studied in surface-wave plasma-Reference-Cited by-同舟云学术

Effect of low-energy ion impact on the structure of hexagonal boron nitride films studied in surface-wave plasma

Published:2018-11-08 Issue:1 Volume:51 Page:126-130
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf Interface Anal

Author:

Torigoe M.¹,Kamimura Y.¹,Teii K.¹^ORCID,Matsumoto S.¹

Affiliation:

1. Department of Applied Science for Electronics and Materials, Interdisciplinary Graduate School of Engineering Sciences; Kyushu University; Kasuga Fukuoka 816-8580 Japan

Funder

MIKIYA Science and Technology Foundation

Advanced Machining Technology and Development Association

Japan Society for the Promotion of Science

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sia.6573/fullpdf

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5. Study on electrical characteristics of metal/boron nitride/metal and boron nitride/silicon structures;Kimura;Diamond Relat Mater,2001

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