Stresses in silicon substrates near isolation trenches
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.349047
Reference15 articles.
1. Effect of static uniaxial stress on the Raman spectrum of silicon
2. Stress from isolation trenches in silicon substrates
3. Stress from a parallelepipedic thermal inclusion in a semispace
4. Stress Effects in Boron‐Implanted Polysilicon Films
5. The Deformation of Polycrystalline‐Silicon Deposited on Oxide‐Covered Single Crystal Silicon Substrates
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