Author:
Breuer T.,Kerst U.,Boit C.,Langer E.,Ruelke H.,Fissel A.
Subject
General Physics and Astronomy
Reference31 articles.
1. P. Bai, C. Auth, S. Balakrishnan et al., in IEEE IEDM Technical Digest (2004), pp. 657–660.
2. Porous pSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared by PECVD
3. T. Breuer, U. Kerst, C. Boit, E. Langer, and H. Ruelke, in IEEE IPFA Proceedings (2010), pp. 91–96.
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