Critical properties and charge transport in ethylene bridged organosilica low-κ dielectrics-Reference-Cited by-同舟云学术

Critical properties and charge transport in ethylene bridged organosilica low-κ dielectrics

Published:2020-05-21 Issue:19 Volume:127 Page:195105
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Perevalov Timofey V.¹²^ORCID,Gismatulin Andrei A.¹,Seregin Dmitry S.³^ORCID,Wang Yingjie⁴,Xu Haoyu⁴,Kruchinin Vladimir N.¹,Spesivcev Evgeniy V.¹,Gritsenko Vladimir A.¹²⁵,Nasyrov Kamil’ A.⁶,Prosvirin Igor’ P.⁷^ORCID,Zhang Jing⁴^ORCID,Vorotilov Konstantin A.³^ORCID,Baklanov Mikhail R.³⁴^ORCID

Affiliation:

1. Rzhanov Institute of Semiconductor Physics SB RAS, 13 Lavrentiev Ave., 630090 Novosibirsk, Russia

2. Novosibirsk State University, 2 Pirogov Str., 630090 Novosibirsk, Russia

3. MIREA, Russian Technological University, 78 Vernadsky Ave., 119454 Moscow, Russia

4. North China University of Technology, 5 Jinyuanzhuang Rd., Shijingshan District, Beijing 100144, China

5. Novosibirsk State Technical University, 20 Marks Ave., 630073 Novosibirsk, Russia

6. Institute of Automation and Electrometry, 1 Koptyug Ave., 630090 Novosibirsk, Russia

7. Boreskov Institute of Catalysis, SB RAS, 5 Lavrentiev Ave., 630090 Novosibirsk, Russia

Funder

Russian Foundation for Basic Research

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5145239

Reference78 articles.

1. Advanced Interconnects for ULSI Technology

2. High-performance interconnects: an integration overview

3. Synthesis of organically modified mesoporous silica as a low dielectric constant intermetal dielectric

4. Dielectric property and microstructure of a porous polymer material with ultralow dielectric constant

5. Low Dielectric Constant Materials

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