Charge transport mechanism in periodic mesoporous organosilica low-k dielectric-Reference-Cited by-同舟云学术

Charge transport mechanism in periodic mesoporous organosilica low-k dielectric

Published:2019-08-19 Issue:8 Volume:115 Page:082904
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Gismatulin A. A.¹²^ORCID,Gritsenko V. A.¹²³^ORCID,Seregin D. S.⁴^ORCID,Vorotilov K. A.⁴^ORCID,Baklanov M. R.⁴⁵^ORCID

Affiliation:

1. Rzhanov Institute of Semiconductor Physics SB RAS, 13 Lavrentiev Ave., 630090 Novosibirsk, Russia

2. Department of Physics, Novosibirsk State University, 2 Pirogov Str., 630090 Novosibirsk, Russia

3. Automation and Computer Engineering Department, Novosibirsk State Technical University, 20 Marx Ave., 630073 Novosibirsk, Russia

4. MIREA–Russian Technological University, 78 Vernadsky ave, 119454 Moscow, Russia

5. North China University of Technology, 5 Jinyuanzhuang Rd., Shijingshan District, Beijing 100144, China

Funder

Russian state research

Российский Фонд Фундаментальных Исследований

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5113633

Reference35 articles.

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3. History of Organic-Inorganic Hybrid Materials: Prehistory, Art, Science, and Advanced Applications

4. Evaporation-Induced Self-Assembly: Nanostructures Made Easy

5. Low dielectric constant materials for microelectronics

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