Low‐temperature direct nitridation of silicon in nitrogen plasma generated by microwave discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.335915
Reference7 articles.
1. Thermal nitridation of Si and SiO2for VLSI
2. Nitridation of silicon in a multiwafer plasma system
3. Silicon oxynitride films prepared by plasma nitridation of silicon and their application for tunnel metal‐insulator‐silicon diodes
4. Excimer laser enhanced nitridation of silicon substrates
5. Plasma Anodic Nitridation of Silicon in N 2 ‐ H 2 System
Cited by 19 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. High-dielectric-constant silicon nitride thin films fabricated by radio frequency sputtering in Ar and Ar/N2 gas mixture;Thin Solid Films;2020-09
2. Silicon Nitride Encapsulated Silicon Nanocrystals for Lithium Ion Batteries;Plasma Processes and Polymers;2015-12-11
3. Studies on structural and electrical properties of silicon nitride films deposited by unbalanced magnetron sputter deposition;Materials Science and Engineering: B;2002-03
4. Bulk and interface properties of low-temperature silicon nitride films deposited by remote plasma enhanced chemical vapor deposition;Journal of Materials Science: Materials in Electronics;2001
5. Highly robust ultrathin silicon nitride films grown at low-temperature by microwave-excitation high-density plasma for giga scale integration;IEEE Transactions on Electron Devices;2000-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3