1. Key Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
2. Microsystem and Terahertz Research Center of China Academy of Engineering Physics, Chengdu 610000, China
3. Institute of Electronic Engineering of China Academy of Engineering Physics, Chengdu 610000, China