Fusion bonding of Si wafers investigated by x ray diffraction
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.125659
Reference11 articles.
1. Hydrophobic silicon wafer bonding
2. Bonding of silicon wafers for silicon‐on‐insulator
3. Nature of bonding forces between two hydrogen-passivated silicon wafers
4. The interface structure in directly bonded silicon crystals studied by synchrotron X-ray diffraction
5. Electron diffraction and microscopy studies of the structure of grain boundaries in silicon
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4. Buried hydrophobic silicon bonding studied by high-energy x-ray reflectivity;Journal of Physics D: Applied Physics;2003-04-29
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