Toward two-dimensional self-organization of nanostructures using wafer bonding and nanopatterned silicon surfaces-Reference-Cited by-同舟云学术

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Toward two-dimensional self-organization of nanostructures using wafer bonding and nanopatterned silicon surfaces

Published:2002-08 Issue:8 Volume:38 Page:995-1005
ISSN:0018-9197
Container-title:IEEE Journal of Quantum Electronics
language:en
Short-container-title:IEEE J. Quantum Electron.

Author:

Buttard D.,Eymery J.,Fournel F.,Gentile P.,Leroy F.,Magnea N.,Moriceau H.,Renaud G.,Rieutord F.,Rousseau K.,Rouviere J.-L.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics

Link

http://xplorestaging.ieee.org/ielx5/3/21963/01021016.pdf?arnumber=1021016

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Alternate dissociation of the screw dislocations in a (0 0 1) buried small-angle twist boundary in silicon;Philosophical Magazine;2009-02-11

2. Mechanical Properties and Chemical Reactions at the Directly Bonded Si–Si Interface;Japanese Journal of Applied Physics;2009-01-20

3. Characterization of bonding structures of directly bonded hybrid crystal orientation substrates;Thin Solid Films;2008-11

4. Wafer Direct Bonding: From Advanced Substrate Engineering to Future Applications in Micro/Nanoelectronics;Proceedings of the IEEE;2006-12

5. Preparation of a nanopatterned surface of bonded silicon wafers using electrochemical thinning and chemical etching: A scanning tunnel microscopy investigation;Surface Science;2006-11

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