An atomic layer deposition reactor with dose quantification for precursor adsorption and reactivity studies
Author:
Funder
National Science Foundation
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4774042
Reference37 articles.
1. Atomic Layer Deposition: An Overview
2. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
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4. Reaction Mechanism Studies on Atomic Layer Deposition of Ruthenium and Platinum
5. Atomic layer epitaxy
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