Effect of beam deflection on the thermal responsivity of GaAs-based doubly clamped microelectromechanical beam resonators-Reference-Cited by-同舟云学术

Effect of beam deflection on the thermal responsivity of GaAs-based doubly clamped microelectromechanical beam resonators

Author:

Qiu Boqi¹^ORCID,Zhang Ya²^ORCID,Akahane Kouichi³,Nagai Naomi¹,Hirakawa Kazuhiko¹⁴^ORCID

Affiliation:

1. Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

2. Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan

3. National Institute of Information and Communications Technology, 4-2-1 Nukui-Kitamachi, Koganei, Tokyo 184-8795, Japan

4. Institute for Nano Quantum Information Electronics, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

Funder

Japan Society for the Promotion of Science

Murata Science Foundation

Ministry of Education, Culture, Sports, Science and Technology

Collaborative Research Based on Industrial Demand

Mitsubishi Foundation

Precise Measurement Technology Promotion Foundation

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

Reference25 articles.

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