Nanoelectromechanical systems
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1927327
Reference125 articles.
1. Nanoelectromechanical systems face the future
2. Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals
3. Measurement of mechanical resonance and losses in nanometer scale silicon wires
4. Freely suspended two-dimensional electron gases
5. Monocrystalline silicon carbide nanoelectromechanical systems
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