Measurement of mechanical resonance and losses in nanometer scale silicon wires
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124554
Reference15 articles.
1. Characteristics of polysilicon resonant microbeams
2. Q-factor and frequency shift of resonating silicon diaphragms in air
3. Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure
4. A nanometre-scale mechanical electrometer
5. Micro resonant force gauges
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