Binary pseudo-random patterned structures for modulation transfer function calibration and resolution characterization of a full-field transmission soft x-ray microscope-Reference-Cited by-同舟云学术

Binary pseudo-random patterned structures for modulation transfer function calibration and resolution characterization of a full-field transmission soft x-ray microscope

Published:2015-12 Issue:12 Volume:86 Page:123702
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Yashchuk V. V.¹,Fischer P. J.²³,Chan E. R.¹,Conley R.⁴⁵,McKinney W. R.⁶^ORCID,Artemiev N. A.⁷^ORCID,Bouet N.⁵,Cabrini S.⁸,Calafiore G.⁹,Lacey I.¹,Peroz C.⁹,Babin S.⁹

Affiliation:

1. Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA

2. Center for X-Ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA

3. Physics Department, University of California Santa Cruz, Santa Cruz, California 94056, USA

4. Advance Photon Source, Argonne National Laboratory, Argonne, Illinois 60439, USA

5. National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, New York 11973, USA

6. Diablo Valley College, 321 Golf Club Road, Pleasant Hill, California 94523, USA

7. KLA-Tencor Corp., 1 Technology Drive, Milpitas, California 95035, USA

8. Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA

9. aBeam Technologies, Inc., Hayward, California 94541, USA

Funder

University of California Office of the President, Proof of Concept Grant

National Research Foundation of Korea (NRF)

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4936752

Reference50 articles.

1. Calculation of the power spectral density from surface profile data

2. Cross-check of different techniques for two-dimensional power spectral density measurements of x-ray optics

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