Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards-Reference-Cited by-同舟云学术

Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards

Published:2022-10-04 Issue: Volume: Page:
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Container-title:Advances in X-Ray/EUV Optics and Components XVII
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Author:

Yashchuk Valeriy V.,Munechika Keiko,Rochester Simon,Chao Weilun,Lacey Ian,Pina-Hernandez Carlos,Takacs Peter Z.

Publisher

SPIE

Reference40 articles.

1. Modulation Transfer Function in Optical and Electro-Optical Systems

2. ISO, 25178-600: Geometrical Product Specification (GPS) – Surface Texture: Areal – Part 600: Metrological Characteristics for Areal-topography Measuring Methods (International Organization for Standardization, 2019); https://www.iso.org/standard/67651.html.

3. The Limits of Resolution;de Villiers,2019

4. Determination of the transfer function for optical surface topography measuring instruments—a review

5. The instrument transfer function for optical measurements of surface topography

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