A Surface View of Etching
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://physicstoday.scitation.org/doi/pdf/10.1063/1.882369
Reference13 articles.
1. Surface science aspects of etching reactions
2. Scanning-tunneling-microscopy study of the Si(111)-7×7 rest-atom layer following adatom removal by reaction with Cl
3. Br2andCl2adsorption and etching of GaAs(110) studied by use of scanning tunneling microscopy
4. Ion sputtering of GaAs(110): From individual bombardment events to multilayer removal
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3. Atomic Layer Etching at the Tipping Point: An Overview;ECS Journal of Solid State Science and Technology;2015
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