Br2andCl2adsorption and etching of GaAs(110) studied by use of scanning tunneling microscopy
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.48.17913/fulltext
Reference31 articles.
1. Surface science aspects of etching reactions
2. Layer-by-layer etching of Si(100)-2×1 withBr2: A scanning-tunneling-microscopy study
3. The thermal and ion-assisted reactions of GaAs(100) with molecular chlorine
4. Unusual electron beam effects in the GaAs (100)/Cl2 system
5. Chemical routes to GaAs etching with low-energy ion beams
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