1. Department of Mechanical Engineering, Division of Materials Science and Engineering, and the Photonics Center, Boston University, Boston, Massachusetts 02215, USA
2. Demirci Bio-Acoustic-MEMS in Medicine (BAMM) Laboratory, Canary Center at Stanford for Cancer Early Detection, Stanford University School of Medicine, Palo Alto, California 94304, USA
3. Department of Mechanical Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061, USA