Stress measurements using ultraviolet micro-Raman spectroscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.125044
Reference11 articles.
1. Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits
2. Stress Measurements in sub-μm Si Structures Using Raman Spectroscopy
3. Strain imaging analysis of Si using Raman microscopy
4. Strain at SiSiO2 interfaces studied by Micron-Raman spectroscopy
5. A scaling consideration on mechanical stress-induced hot-carrier effects
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