Electrical and structural properties of solid phase crystallized polycrystalline silicon and their correlation to single-electron effects
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1331338
Reference22 articles.
1. Single-electron memory
2. Single atom scale lithography for single electron devices
3. Fabrication and Electrical Characteristics of Single Electron Tunneling Devices Based on Si Quantum Dots Prepared by Plasma Processing
4. New excimer‐laser‐crystallization method for producing large‐grained and grain boundary‐location‐controlled Si films for thin film transistors
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