Effect of nitrogen on the electrical and structural properties of triode‐sputtered tantalum films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1661039
Reference20 articles.
1. Effects of Nitrogen, Methane, and Oxygen on Structure and Electrical Properties of Thin Tantalum Films
2. Deposition of Tantalum, Tantalum Oxide, and Tantalum Nitride with Controlled Electrical Characteristics
3. Structural and Electrical Properties of Tantalum Films Sputtered in Oxygen‐Argon Mixtures
4. Effect of Oxygen on the Electrical and Structural Properties of Triode‐Sputtered Tantalum Films
Cited by 37 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Study on the Electrical, Structural, Chemical and Optical Properties of PVD Ta(N) Films Deposited with Different N2 Flow Rates;Coatings;2021-08-05
2. The role of electronegativity on the extent of nitridation of group 5 metals as revealed by reactions of tantalum cluster cations with ammonia molecules;Physical Chemistry Chemical Physics;2018
3. Structural modification of tantalum crystal induced by nitrogen ion implantation;Bulletin of Materials Science;2016-06
4. Effects of nitrogen composition on the resistivity of reactively sputtered TaN thin films;Surface and Interface Analysis;2014-11-18
5. Effects of Nitrogen Content on the Phase and Resistivity of TaN Thin Films Deposited by Electron Beam Evaporation;JOM;2014-06-19
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3