Velocity controlled anodization nanolithography with an atomic force microscope using Faradaic current feedback
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2711377
Reference20 articles.
1. Nanometer‐scale oxidation of Si(100) surfaces by tapping mode atomic force microscopy
2. Kinetics of field-induced oxidation of hydrogen-terminated Si(111)
3. Role of space charge in scanned probe oxidation
4. Patterning of silicon surfaces with noncontact atomic force microscopy: Field-induced formation of nanometer-size water bridges
5. Kinetics of scanned probe oxidation: Space-charge limited growth
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1. Nanoscale Lithography on Monolayer Graphene Using Hydrogenation and Oxidation;ACS Nano;2011-07-26
2. Formation of uniform nanoscale oxide layers assembled by overlapping oxide lines using atomic force microscopy;Journal of Micro/Nanolithography, MEMS, and MOEMS;2009-10-01
3. Nanoscale Chemical Effect on Friction Force;Journal of Nanoscience and Nanotechnology;2008-11-01
4. AFM-based voltage assisted nanoelectrospinning;Materials Letters;2008-02
5. Atomic force microscope based nanofabrication of master pattern molds for use in soft lithography;Applied Physics Letters;2007-09-17
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