Nanometer‐scale oxidation of Si(100) surfaces by tapping mode atomic force microscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.360505
Reference16 articles.
1. Modification of hydrogen‐passivated silicon by a scanning tunneling microscope operating in air
2. Modification of HF‐treated silicon (100) surfaces by scanning tunneling microscopy in air under imaging conditions
3. Fabrication of silicon nanostructures with a scanning tunneling microscope
4. Selective area oxidation of silicon with a scanning force microscope
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